 ==================================================================
              Calculation using SRIM-2006 
              SRIM version ---> SRIM-2008.04
              Calc. date   ---> October 10, 2012 
 ==================================================================

 Disk File Name = SRIM Outputs\Oxygen in Silicon

 Ion = Oxygen [8] , Mass = 15.995 amu

 Target Density =  2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3
 ======= Target  Composition ========
    Atom   Atom   Atomic    Mass     
    Name   Numb   Percent   Percent  
    ----   ----   -------   -------  
     Si     14    100.00    100.00   
 ====================================
 Bragg Correction = 0.00%
 Stopping Units =  MeV / (mg/cm2) 
 See bottom of Table for other Stopping units 

   Ion        dE/dx      dE/dx     Projected  Longitudinal   Lateral
  Energy      Elec.      Nuclear     Range     Straggling   Straggling
-----------  ---------- ---------- ----------  ----------  ----------
  10.00 keV   4.199E-01  7.384E-01     268 A       152 A       110 A   
  11.00 keV   4.404E-01  7.316E-01     292 A       163 A       119 A   
  12.00 keV   4.600E-01  7.244E-01     315 A       174 A       127 A   
  13.00 keV   4.788E-01  7.169E-01     339 A       185 A       135 A   
  14.00 keV   4.969E-01  7.092E-01     363 A       196 A       143 A   
  15.00 keV   5.143E-01  7.014E-01     387 A       206 A       150 A   
  16.00 keV   5.312E-01  6.936E-01     411 A       217 A       158 A   
  17.00 keV   5.475E-01  6.859E-01     435 A       227 A       166 A   
  18.00 keV   5.634E-01  6.782E-01     459 A       237 A       173 A   
  20.00 keV   5.939E-01  6.631E-01     507 A       256 A       188 A   
  22.50 keV   6.299E-01  6.449E-01     567 A       280 A       206 A   
  25.00 keV   6.640E-01  6.276E-01     627 A       303 A       224 A   
  27.50 keV   6.964E-01  6.111E-01     687 A       325 A       242 A   
  30.00 keV   7.273E-01  5.955E-01     746 A       346 A       259 A   
  32.50 keV   7.615E-01  5.807E-01     806 A       367 A       276 A   
  35.00 keV   8.085E-01  5.667E-01     865 A       387 A       293 A   
  37.50 keV   8.495E-01  5.534E-01     923 A       405 A       310 A   
  40.00 keV   8.855E-01  5.408E-01     981 A       424 A       326 A   
  45.00 keV   9.452E-01  5.175E-01    1095 A       458 A       357 A   
  50.00 keV   9.934E-01  4.965E-01    1208 A       491 A       387 A   
  55.00 keV   1.034E+00  4.773E-01    1321 A       522 A       416 A   
  60.00 keV   1.071E+00  4.598E-01    1433 A       552 A       444 A   
  65.00 keV   1.104E+00  4.437E-01    1545 A       581 A       471 A   
  70.00 keV   1.136E+00  4.289E-01    1658 A       609 A       497 A   
  80.00 keV   1.194E+00  4.026E-01    1881 A       662 A       549 A   
  90.00 keV   1.248E+00  3.798E-01    2103 A       712 A       598 A   
 100.00 keV   1.298E+00  3.598E-01    2324 A       759 A       645 A   
 110.00 keV   1.344E+00  3.422E-01    2542 A       802 A       691 A   
 120.00 keV   1.389E+00  3.264E-01    2759 A       844 A       734 A   
 130.00 keV   1.432E+00  3.123E-01    2974 A       883 A       777 A   
 140.00 keV   1.473E+00  2.996E-01    3187 A       920 A       818 A   
 150.00 keV   1.514E+00  2.879E-01    3398 A       956 A       858 A   
 160.00 keV   1.555E+00  2.773E-01    3607 A       989 A       896 A   
 170.00 keV   1.595E+00  2.676E-01    3813 A      1021 A       934 A   
 180.00 keV   1.635E+00  2.586E-01    4017 A      1052 A       970 A   
 200.00 keV   1.714E+00  2.426E-01    4417 A      1109 A      1039 A   
 225.00 keV   1.814E+00  2.256E-01    4904 A      1173 A      1119 A   
 250.00 keV   1.915E+00  2.111E-01    5374 A      1231 A      1194 A   
 275.00 keV   2.016E+00  1.985E-01    5828 A      1283 A      1263 A   
 300.00 keV   2.118E+00  1.876E-01    6267 A      1330 A      1328 A   
 325.00 keV   2.220E+00  1.780E-01    6692 A      1372 A      1388 A   
 350.00 keV   2.322E+00  1.694E-01    7102 A      1410 A      1444 A   
 375.00 keV   2.425E+00  1.617E-01    7498 A      1445 A      1496 A   
 400.00 keV   2.526E+00  1.548E-01    7882 A      1477 A      1544 A   
 450.00 keV   2.729E+00  1.427E-01    8614 A      1534 A      1633 A   
 500.00 keV   2.928E+00  1.326E-01    9303 A      1583 A      1711 A   
 550.00 keV   3.123E+00  1.240E-01    9954 A      1624 A      1781 A   
 600.00 keV   3.312E+00  1.166E-01    1.06 um     1661 A      1843 A   
 650.00 keV   3.496E+00  1.101E-01    1.12 um     1693 A      1900 A   
 700.00 keV   3.674E+00  1.043E-01    1.17 um     1721 A      1951 A   
 800.00 keV   4.011E+00  9.465E-02    1.28 um     1771 A      2040 A   
 900.00 keV   4.322E+00  8.677E-02    1.38 um     1813 A      2116 A   
   1.00 MeV   4.607E+00  8.022E-02    1.47 um     1848 A      2182 A   
   1.10 MeV   4.867E+00  7.468E-02    1.56 um     1877 A      2240 A   
   1.20 MeV   5.103E+00  6.992E-02    1.64 um     1903 A      2291 A   
   1.30 MeV   5.318E+00  6.579E-02    1.72 um     1926 A      2337 A   
   1.40 MeV   5.512E+00  6.216E-02    1.80 um     1947 A      2379 A   
   1.50 MeV   5.688E+00  5.895E-02    1.87 um     1966 A      2418 A   
   1.60 MeV   5.846E+00  5.608E-02    1.94 um     1983 A      2453 A   
   1.70 MeV   5.990E+00  5.351E-02    2.02 um     1998 A      2486 A   
   1.80 MeV   6.119E+00  5.118E-02    2.09 um     2013 A      2517 A   
   2.00 MeV   6.340E+00  4.713E-02    2.22 um     2044 A      2574 A   
   2.25 MeV   6.558E+00  4.296E-02    2.39 um     2081 A      2636 A   
   2.50 MeV   6.725E+00  3.952E-02    2.55 um     2113 A      2692 A   
   2.75 MeV   6.852E+00  3.663E-02    2.70 um     2144 A      2743 A   
   3.00 MeV   6.948E+00  3.417E-02    2.86 um     2172 A      2790 A   
   3.25 MeV   7.020E+00  3.204E-02    3.01 um     2198 A      2834 A   
   3.50 MeV   7.073E+00  3.019E-02    3.16 um     2223 A      2875 A   
   3.75 MeV   7.111E+00  2.855E-02    3.31 um     2247 A      2914 A   
   4.00 MeV   7.137E+00  2.709E-02    3.46 um     2270 A      2951 A   
   4.50 MeV   7.163E+00  2.461E-02    3.76 um     2333 A      3022 A   
   5.00 MeV   7.165E+00  2.258E-02    4.06 um     2393 A      3087 A   
   5.50 MeV   7.152E+00  2.088E-02    4.36 um     2450 A      3149 A   
   6.00 MeV   7.130E+00  1.944E-02    4.66 um     2506 A      3209 A   
   6.50 MeV   7.101E+00  1.819E-02    4.96 um     2561 A      3266 A   
   7.00 MeV   7.069E+00  1.711E-02    5.26 um     2614 A      3321 A   
   8.00 MeV   7.000E+00  1.531E-02    5.87 um     2786 A      3427 A   
   9.00 MeV   6.928E+00  1.387E-02    6.49 um     2949 A      3529 A   
  10.00 MeV   6.857E+00  1.270E-02    7.11 um     3106 A      3628 A   
-----------------------------------------------------------
 Multiply Stopping by        for Stopping Units
 -------------------        ------------------
  2.3211E+01                 eV / Angstrom 
  2.3211E+02                keV / micron   
  2.3211E+02                MeV / mm       
  1.0000E+00                keV / (ug/cm2) 
  1.0000E+00                MeV / (mg/cm2) 
  1.0000E+03                keV / (mg/cm2) 
  4.6637E+01                 eV / (1E15 atoms/cm2)
  4.2475E-01                L.S.S. reduced units
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 (C) 1984,1989,1992,1998,2008 by J.P. Biersack and J.F. Ziegler
